Semiconductor Fabrication Documentation

Comprehensive guide to semiconductor fabrication techniques and processes.

Table of Contents

• 🔬 Patterning and Lithography
• 📥 Deposition Techniques
• 🧪 Etching Techniques
• 🛠️ Fabrication Workflow

General Notes

Reference Materials

• Equipment Spreadsheet
• Fabublox Process Editor

Lithography Overview

Lithography in semiconductor fabrication is a process used to transfer patterns onto a substrate (usually silicon):

1. Coating - Substrate with light-sensitive material called photoresist
2. Exposing - Specific areas to light through a mask to get a desired pattern
3. Developing - The photoresist (removes the exposed areas) or unexposed areas (negative photoresist)
4. Processing - Using patterned photoresist for etching or deposition